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    Deep level transient spectroscopy study of the damage induced in n-type silicon by a gate oxide etching in a CHF3/Ar plasma

    Deep level transient spectroscopy study of the damage induced in n-type silicon by a gate oxide etching in a CHF3/Ar plasma by Adegboyega, G., Perez, I.V, Poggi, Antonella, Susi, E

    Published 2020
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