檢索結果 - Perez, I.V

  • Showing 1 - 1 results of 1
Refine Results
  1. 1
    Deep level transient spectroscopy study of the damage induced in n-type silicon by a gate oxide etching in a CHF3/Ar plasma

    Deep level transient spectroscopy study of the damage induced in n-type silicon by a gate oxide etching in a CHF3/Ar plasma 由 Adegboyega, G., Perez, I.V, Poggi, Antonella, Susi, E

    出版 2020
    獲取全文
    雜誌
    加到收藏夾
    Saved in:

檢索工具: