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    Deep level transient spectroscopy study of the damage induced in n-type silicon by a gate oxide etching in a CHF3/Ar plasma

    Deep level transient spectroscopy study of the damage induced in n-type silicon by a gate oxide etching in a CHF3/Ar plasma av Adegboyega, G., Perez, I.V, Poggi, Antonella, Susi, E

    Publicerad 2020
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    The effects of oxygen precipitates on the electrical properties of silver impurities in p-type silicon

    The effects of oxygen precipitates on the electrical properties of silver impurities in p-type silicon av Adegboyega, G.A, Passari, L, Butturri, M.A, Susi, E

    Publicerad 2023
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