Adegboyega, G., Perez, I., Poggi, A., & Susi, E. (2020). Deep level transient spectroscopy study of the damage induced in n-type silicon by a gate oxide etching in a CHF3/Ar plasma. Journal of vacuum science & technology B.
Lua i Stíl Chicago (17ú heag.)Adegboyega, G., I.V Perez, Antonella Poggi, agus E. Susi. Deep Level Transient Spectroscopy Study of the Damage Induced in N-type Silicon by a Gate Oxide Etching in a CHF3/Ar Plasma. Journal of vacuum science & technology B, 2020.
Lua MLA (9ú heag.)Adegboyega, G., et al. Deep Level Transient Spectroscopy Study of the Damage Induced in N-type Silicon by a Gate Oxide Etching in a CHF3/Ar Plasma. Journal of vacuum science & technology B, 2020.
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