Deep level transient spectroscopy study of the damage induced in n-type silicon by a gate oxide etching in a CHF3/Ar plasma

Deep level transient spectroscopy study of the damage induced in n-type silicon by a gate oxide etching in a CHF3/Ar plasma

International Journal of vacuum science & technology B 15(3):623 - 628

保存先:

書誌詳細
主要な著者:	Adegboyega, G., Perez, I.V, Poggi, Antonella, Susi, E
フォーマット:	雑誌
言語:	英語
出版事項:	Journal of vacuum science & technology B 2020
主題:	transient spectroscopy the dry etching Arrhenius plot activation energies,
オンライン･アクセス:	https://ir.oauife.edu.ng/handle/123456789/5091
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

類似資料

Intrinsic gettering of Cr impurities in p-type Cz silicon
著者:: Adegboyega, G.A, 等
出版事項: (2023)

Electrical Properties of Silver Impurities and their Annealing Behaviour in p-Type Fz Silicon
著者:: Adegboyega, G.A, 等
出版事項: (2023)

Beyond the school gates questioning the extended schools and full service agendas
著者:: Cummings, Colleen
出版事項: (2011)

Organic spectroscopy
著者:: AHLUWALIA, V.K
出版事項: (2020)

Geomagnetic Deep Sounding of Southwestern Nigeria.
著者:: Arubayi, John Blackie
出版事項: (2014)

The effects of oxygen precipitates on the electrical properties of silver impurities in p-type silicon
著者:: Adegboyega, G.A, 等
出版事項: (2023)

Mossbauer Spectroscopy of Tin Compounds.
著者:: Arua, Awa Eke
出版事項: (2014)

Mossbauer spectroscopy of Tin compounds
著者:: Arua, Awa Eke
出版事項: (2019)

Calcareous Nannofossil Biozonation Scheme of the Deep Offshore Niger Delta
著者:: Fadiya, Lawrence Suyi
出版事項: (2015)

EXTRACTABLE SILICON AND IRON STATUS OF SOME SOUTHWESTERN NIGERIAN SOILS
著者:: ASHAYE, T. I., 等
出版事項: (2020)

COMPARATIVE STUDY OF THE MID-IR SPECTROSCOPY AND CHEMICAL METHOD FOR SOIL PHYSICAL AND CHEMICAL PROPERTIES
著者:: Ojo, A O, 等
出版事項: (2017)

Heavy metals speciation study of some selected personal care products in Nigeria by atomic absorption spectroscopy
著者:: Asafa, Naheem Oladayo
出版事項: (2019)

Heavy metals speciation study of some selected personal care products in Nigeria by atomic absorption spectroscopy
著者:: Asafa, Naheem Oladayo
出版事項: (2023)

Determination of Optimum Grain Refinement Parameters for Hypoeutectic Aluminium-Silicon Alloys by a Volatile Mould Coating Process
著者:: Shittu, Moshood Dehinde
出版事項: (2015)

Photonics optoelectronics for MTech, BTech MSc (Electronics), BSc (Hons/ Pass), GATE, NET/SET
著者:: KAKANI SL Kakani, Shubhra
出版事項: (2017)

Perceived Preparedness of Dental Academic Institutions to Cope with the COVID-19 Pandemic: A Multi-Country Survey.
著者:: Ammar, Nour, 等
出版事項: (2024)

Perceived Preparedness of Dental Academic Institutions to Cope with the COVID-19 Pandemic: A Multi-Country Survey.
著者:: Ammar, Nour, 等
出版事項: (2024)